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| Design and analysis of various microcantilever shapes for MEMS based sensing | 497 |
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| Design and analysis of various microcantilever shapes for MEMS based sensing | 21 | 7 | 3 | 57 | 50 | 13 | 2 |
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| Design and analysis of various microcantilever shapes for MEMS based sensing.pdf | 73 |
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