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| Design and analysis of various microcantilever shapes for MEMS based sensing | 328 |
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| Design and analysis of various microcantilever shapes for MEMS based sensing | 14 | 6 | 14 | 0 | 23 | 7 | 10 |
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| Design and analysis of various microcantilever shapes for MEMS based sensing.pdf | 67 |
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