Design and analysis of various microcantilever shapes for MEMS based sensing
Huzein Fahmi, Hawari
Yufridin, Wahab, Dr.
M. T., Azmi
Ali Yeon, Md Shakaff, Prof. Dr.
Uda, Hashim, Prof. Dr.
Shazlina, Johari, Dr.
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One the major requirements for sensing devices is its sensitivity. This paper presents the design, analysis and simulation of various types of MEMS based microcantilevers shapes and their influence on sensing sensitivity. A commercial finite element analysis software ANSYS is used to analyze the designs. Six different analytical model of the microcantilever were investigated for its Equivalent (von-Mises) stress, maximum deflection and fundamental resonant frequency. Finally, the best sensitive structure is then identified. It is found that the trapezoidal design microcantilever would have significant sensing advantages compared to other remaining microcantilever shape.