Browsing School of Microelectronic Engineering (Theses) by Title
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Characterization of alignment mark to obtain reliable alignment performance in advanced lithography
(Universiti Malaysia Perlis (UniMAP)School of Microelectronic Engineering, 2007)The continued downscaling of semiconductor fabrication has imposed increasingly tighter overlay tolerances. Such tight tolerances will require very high performance in alignment. Hence, the objective of this research to ... -
Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication
(Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM)School of Microelectronic Engineering, 2006-04)Single-electron transistor (SET) is one of the promising nanotechnologies and distinguished by a very small device size and low power dissipation. This project explains the SET mask design, SET process flow development, ... -
Fabrication and characterization of ultra thin Si0₂ for nano devices: surface morphology and electrical study
(Universiti Malaysia Perlis (UniMAP)School of Microelectronic Engineering, 2007)The aim of this research is to fabricate and characterize (optical and electrical) an ultra thin silicon dioxide for sub nano devices. In this research, dry oxidation method using high temperature furnace is chosen to ... -
Fabrication of Silicon Nanowires using Scanning Electron Microscope based Electron Beam Lithography method
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007)Nanowires is a new class of materials that have attracted attention and great research interest in the last few years because of their potential applications in nanotechnology such as nanoelectronic, nanomechanical and ...