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| Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous | 117 |
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| Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous | 1 | 1 | 8 | 19 | 7 | 1 | 0 |
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| Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous.pdf | 24 |
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