BaₓSr₁-ₓ TiO₃ different thickness analysis using sol gel approach
Zaliman, Sauli, Dr.
They, Yee Chin
Khairul Anwar, Mohamad Khazali
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Barium Strontium Titanate (BST) a common topic in the microelectronic field for many devices which is mainly on dynamic random access memories (DRAM). There are many methods of preparing BaₓSr₁-ₓTiO3; barium strontium titanate. In this work, sol-gel method was used as it has some advantages like better homogeneity, lower cost, lower processing temperature and easier fabrication. BaₓSr₁-ₓTiO3 solution was deposited on the silicon substrate of 4 different thicknesses with different ratio of the concentration of Barium (Ba). The thickness of the thin film has a linear increase as the Ba content increases.