• Login
    View Item 
    •   DSpace Home
    • Journal Articles
    • School of Microelectronic Engineering (Articles)
    • View Item
    •   DSpace Home
    • Journal Articles
    • School of Microelectronic Engineering (Articles)
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Analysis on surface roughness and surface reflectance through DOE

    Thumbnail
    View/Open
    Analysis on surface roughness and surface reflectance through DOE.pdf (172.9Kb)
    Date
    2014
    Author
    Zaliman, Sauli, Dr.
    Retnasamy, Vithyacharan
    Ong, Tee Say
    Metadata
    Show full item record
    Abstract
    The Lambda 950 spectrometers are designed to investigate and examine surface coating on test specimen by using the light source. The objective of this research is to investigate the factors that affect the surface roughness and reflectance after different parameter of Reactive Ion Etching (RIE) process. There are four parameters to control the RIE process which is temperature, vacuum, RF (Radio Frequency) power and gas flow. The parameters in this research are using a Full Factorial Experimentation technique, the Design of Experiment (DOE). The AFM (Atomic Force Microscope) and Lambda 950 spectrometer are used to analyse the surface roughness and light reflectance of the specimen. The result showed all four parameters of RIE were give effect on surface roughness and surface reflectance. The parameter of gas flow is the most influence factor for surface roughness and surface reflectance compared to other parameters in this work.
    URI
    http://dspace.unimap.edu.my:80/dspace/handle/123456789/33661
    Collections
    • Vithyacharan Retnasamy [54]
    • Zaliman Sauli, Lt. Kol. Professor Dr. [55]
    • School of Microelectronic Engineering (Articles) [183]

    Atmire NV

    Perpustakaan Tuanku Syed Faizuddin Putra (PTSFP) | Send Feedback
     

     

    Browse

    All of UniMAP Library Digital RepositoryCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsThis CollectionBy Issue DateAuthorsTitlesSubjects

    My Account

    LoginRegister

    Statistics

    View Usage Statistics

    Atmire NV

    Perpustakaan Tuanku Syed Faizuddin Putra (PTSFP) | Send Feedback