Browsing School of Microelectronic Engineering (Articles) by Subject "Photolithography"
Now showing items 1-2 of 2
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Conventional photolithography and process optimization of pattern- size expansion technique for nanogap biosensor fabrication
(Trans Tech Publications, 2014)For a submicron photolithography process, there is little room for error. In this paper, an optimized technique for photoresist (PR) development is reported, to fabricate a nanogap biosensor for application in biomedical ... -
Low loss optimization of strip channel polysilicon waveguide fabrication
(American-Eurasian Network for Scientific Information, 2013)Research on waveguide structures, its behaviour and material properties are very extensive for a wide range of applications. Generally, waveguides are used for optical devices such as biosensors. This paper investigates ...