Browsing School of Microelectronic Engineering (Articles) by Subject "Liquid Capacitor (LCap)"

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    • Design and fabrication of Microfluidic devices: MOSFET & Capacitor 

      Osman, R. A.; Esa, S. R.; Prabakaran, Poopalan (Institute of Electrical and Electronics Engineers (IEEE), 2006)
      Microfluidic devices, based on silicon, are fabricated by photolithography, wet chemical etching with focus on an liquid conduction channel n-channel depletion MOSFET and a silica-liquid dielectric capacitor. Masks for ...