Browsing School of Microelectronic Engineering (Articles) by Author "Mohd Jeffrey, Manaf"
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Alignment mark architecture effect on alignment signal behavior in advanced lithography
Normah, Ahmad; Uda, Hashim; Mohd Jeffrey, Manaf; Kader Ibrahim, Abdul Wahab (Institute of Electrical and Electronics Engineering (IEEE), 2006)The downscaling of CMOS technology becomes a challenge to the scanner alignment system since overlay and alignment accuracy becomes tighter. Such a tight overlay requirement requires a very stable alignment performance. A ...