| dc.contributor.author | Huzein Fahmi, Hawari | |
| dc.contributor.author | Yufridin, Wahab, Dr. | |
| dc.contributor.author | M. T., Azmi | |
| dc.contributor.author | Ali Yeon, Md Shakaff, Prof. Dr. | |
| dc.contributor.author | Uda, Hashim, Prof. Dr. | |
| dc.contributor.author | Shazlina, Johari, Dr. | |
| dc.date.accessioned | 2015-04-22T04:08:35Z | |
| dc.date.available | 2015-04-22T04:08:35Z | |
| dc.date.issued | 2014 | |
| dc.identifier.citation | Journal of Physics: Conference Series, vol. 495(1), 2014, pages 1-9 | en_US |
| dc.identifier.issn | 1742-6588 | |
| dc.identifier.uri | iopscience.iop.1/012045/org/1742-6596/495/ | |
| dc.identifier.uri | http://dspace.unimap.edu.my:80/xmlui/handle/123456789/39546 | |
| dc.description | Link to publisher's homepage at http://iopscience.iop.org/ | en_US |
| dc.description.abstract | One the major requirements for sensing devices is its sensitivity. This paper presents the design, analysis and simulation of various types of MEMS based microcantilevers shapes and their influence on sensing sensitivity. A commercial finite element analysis software ANSYS is used to analyze the designs. Six different analytical model of the microcantilever were investigated for its Equivalent (von-Mises) stress, maximum deflection and fundamental resonant frequency. Finally, the best sensitive structure is then identified. It is found that the trapezoidal design microcantilever would have significant sensing advantages compared to other remaining microcantilever shape. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Institute of Physics Publishing | en_US |
| dc.subject | Composite micromechanics | en_US |
| dc.subject | Micro-cantilevers | en_US |
| dc.subject | Chemical sensors | en_US |
| dc.subject | Maximum deflection | en_US |
| dc.title | Design and analysis of various microcantilever shapes for MEMS based sensing | en_US |
| dc.type | Article | en_US |
| dc.contributor.url | huzeinfahmi@gmail.com | en_US |
| dc.contributor.url | yufridin@unimap.edu.my | en_US |
| dc.contributor.url | aliyeon@unimap.edu.my | en_US |
| dc.contributor.url | uda@unimap.edu.my | en_US |
| dc.contributor.url | shazlinajohari@unimap.edu.my | en_US |
