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| Design and analysis of various microcantilever shapes for MEMS based sensing | 337 |
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| Design and analysis of various microcantilever shapes for MEMS based sensing | 6 | 14 | 0 | 23 | 7 | 10 | 9 |
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| Design and analysis of various microcantilever shapes for MEMS based sensing.pdf | 68 |
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