Browsing Uda Hashim, Prof. Ts. Dr. by Author "Nik Hazura, Nik Hamat"
Now showing items 1-3 of 3
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Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology
Uda, Hashim; Ramzan, Mat Ayub; Nik Hazura, Nik Hamat (Universiti Kebangsaan Malaysia, 2007)This paper involves the planarization of borophosphosilicate glass (BPSG) film using a new recipe for annealing process to improve the borophosphosilicate glass (BPSG) film flatness after reflow. This improvement is for ... -
Shallow junction formation: A simulation based study of thermal diffusion by spin-on-dopants technique
Uda, Hashim, Prof. Dr.; Tijjani Adam, Shuwa; Nik Hazura, Nik Hamat; Siti Fatimah (AENSI Publications, 2012)Ultra shallow junction fabrication in large scaled integrated (ULSI) technology is one of the difficult challenges in device manufacturing. Low energy ion implantation is the most widely used technique at present to form ... -
Simulasi Fabrikasi Simpangan Cetek Ultra menggunakan Resapan Dopan daripada SOD (Spin On Dopant)
Uda, Hashim; Nik Hazura, Nik Hamat; Fauziyah, Salehuddin; Ibrahim, Ahmad; Sutikno Madnasri (Universiti Malaysia Perlis, 2006)Pembentukan simpangan cetek ultra merupakan suatu proses yang kritikal dalam fabrikasi peranti-peranti submikron bagi teknologi litar terkamil pada masa hadapan. Di dalam penulisan ini, simulasi proses pembentukan simpangan ...