Browsing International Journal of Nanoelectronics and Materials (IJNeaM) by Subject "High temperature"
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A review: Properties of silicon carbide materials in MEMS application
(Universiti Malaysia Perlis (UniMAP), 2020-12)The paper presents the review properties of silicon carbide materials in the MEMS application. The study aims to explore silicon carbide in MEMS technology which considers the development of microscale and integrated devices ...