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Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
(American Institute of Physics, 2010-03-11)
A reversed spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-50 nm structures with conventional dry etching. ...
Design development of SOI based biologically sensitive field-effect transistor (Bio-FET) for earlier detection of cancer cell
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
Cancer cell is a class of disease in which group of cell that display uncontrolled growth, invasion and metastasis. For late stage of cancer cell detection, it is classified as an incurable disease. Hence, SOI Based ...
Development of carbon nanotube based biosensor fabrication for medical diagnostics application
(Institute of Electrical and Electronics Engineers (IEEE), 2010-12-01)
Carbon nanotubes are tiny hollow cylinders, made from a single grapheme sheet, that possess many amazing properties. Spurred by the Human Genome Project, deoxyribonucleic acid (DNA), carbon nanotube based biosensors are ...
Application of e-beam lithography for nanowire development
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
Miniaturization and performance improvements are driving the electronics industry to shrink the feature size of semiconductor device. Because of its diffraction limit, conventional photolithography is becoming increasingly ...
Study of the cycle time behavior for product scaling 0.16um and smaller in foundry
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
This research is to study the cycle time behavior for 0.16um and smaller geometry for wafer product once its started in wafer manufacturing facility. The overall configuration of the process, product, manufacturing and ...
Formation of Si nanostructure using size reduction technique
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
A simple method for the fabrication of nanogaps using conventional photolithography combined with pattern-size reduction techniques is presented. Silicon material is used to fabricate the nanogap structure and gold is used ...
Analysis of optimum dispatching policies for semiconductor fabrication
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
This paper focuses on the comparison of the lot dispatching policies to reveal results for optimum product cycle time. The model is based on the 200mm-wafer size, 12K product Work In Progress (WIP), 10 product mixes in the ...
The usage of max 262 as a programmable low pass filter for nanogap automated permittivity measurement system
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
The Nanogap Automated Permittivity
Measurement System (APMS) are fabricated for
low cost, portable and label free DNA
hybridization detection kit. The nanogap capacitor
can react as a DNA sensor. The difference ...
Development of carbon nanotube based biosensor fabrication for medical diagnostics application
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
Carbon nanotubes are tiny hollow cylinders, made from a single grapheme sheet, that possess many amazing properties. Another reason why nanotubes have generated intense research activities from scientists of various ...
Brief review on ZnO Synthesis methods, thin film & nanowire gas sensors
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
ZnO nanowires are ideal building blocks for a wide range of nanoscale electronics, optoelectronics, and chemical sensing devices. The material properties change when the material is in nanowire form as compare to thin film ...