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Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
(American Institute of Physics, 2010-03-11)
A reversed spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-50 nm structures with conventional dry etching. ...
The usage of max 262 as a programmable low pass filter for nanogap automated permittivity measurement system
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
The Nanogap Automated Permittivity
Measurement System (APMS) are fabricated for
low cost, portable and label free DNA
hybridization detection kit. The nanogap capacitor
can react as a DNA sensor. The difference ...