Design development of SOI based biologically sensitive field-effect transistor (Bio-FET) for earlier detection of cancer cell
Foo, Kai Loong
Uda, Hashim, Prof. Dr.
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Cancer cell is a class of disease in which group of cell that display uncontrolled growth, invasion and metastasis. For late stage of cancer cell detection, it is classified as an incurable disease. Hence, SOI Based Biologically Sensitive Field-Effect Transistor (Bio-FET) was designed in this research for the early stage detection of cancer cell, i.e. stage one or stage two. Bio-FET which is one type of biosensor is mainly used for biological element detection such as nucleic acid, antibodies and enzyme. In this design, four masks were designed and printed on the chrome mask. With the nanowire as smaller as 40nm in width was fabricated with the spacer patterning lithography (SPL) technology and the electrical characterization, this novel design of Bio-FET has the advantage of label-free, ultrasensitive, smaller device and near real-time operation.