Fabrication Of 50 µm transistor and AlNiAu interconnection process
MetadataShow full item record
Generally process fabrication transistor will starts by cleaning the wafer, formation region drain, D and source, S, get oxide and deposited aluminum as contact with the source, drain and gate. Mask is very important thing to develop the pattern transfer in fabrication process Based on that, the project fabrication transistor not successful because quality of mask not very compatible to develop the smaller size. AlNiAu as the interconnection involved of several steps. It starts with Al deposition, the follow by cleaning, activation and zincation to remove the oxide layer thus, provide good adhesive. The next process is nickel deposition and lastly gold in deposited on top of Ni. Gold is used because of is not easily oxidize upon exposure for environment. Size of bond pad, chemical and temperature during the process and most important is thickness of aluminum, passivation and also photoresist layer, must be determined to achieve consistent result.
Showing items related by title, author, creator and subject.
Fabrication and simulation of PNP Bipolar transistor based on Spin On Dopant technique and Electrical characterization Siti Nursyida Azuddin (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)In this project, the fabrication and simulation of pnp transistor was performed. From fabrication process, the electrical characteristic and sheet resistance of the device was observed by 4 point probe measurement. The ...
Amiza, Rasmi; Uda, Hashim (Kolej Universiti Kejuruteraan Utara Malaysia, 2005)Single-electron transistor (SET) is a key element in our research field where device operation is based on one-by-one electron through the channel utilizing the Coulomb blockade effect. The SET are often discussed as ...
The effect of Phosphorous implant in converting the Enhancement Mode Transistor into Depletion Mode Transistor Hazian, Mamat (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008)Metal-Oxide-Semiconductor field effect transistor (MOSFET) forms the basis in most of electronic applications. In certain part of electronic circuitry, there is a requirement to use depletion mode of MOSFET which delivers ...