Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "Nano-gap"
Now showing items 1-2 of 2
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Fabrication and characterization of 50 nm silicon nano-gap structures
(American Scientific Publishers, 2011-04)A simple method for the fabrication of nano-gaps less than 50 nm by using conventional photolithography combined with patterned-size reduction techniques is presented. Silicon material is used to fabricate the nano-gap ... -
Fabrication and characterization of gold nano-gaps for ssDNA immobilization and hybridization detection
(Journal of New Materials for Electrochemical Systems, 2011)We develop a method for fabricating the nano-gaps directly by using just photolithography and wet etching processes without any nano lithography or difficult techniques. It shows that this resolution enhancement allows one ...