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Conventional photolithography and process optimization of pattern- size expansion technique for nanogap biosensor fabrication
(Trans Tech Publications, 2014)
For a submicron photolithography process, there is little room for error. In this paper, an optimized technique for photoresist (PR) development is reported, to fabricate a nanogap biosensor for application in biomedical ...
Simulation of 1GHz center frequency SAW using CST software for biosensor application
(IDOSI Publications, 2013)
Surface Acoustic Wave (SAW) is a one of the essential components that used for sensor application to detect in various fields. The high center frequencywill improve the sensitivity of SAW biosensor. Therefore, it's very ...