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Low cost detection of pH and its effect on the capacitive behavior of micro-gap sensor
(Trans Tech Publications, 2014)
The article describes the fabrication and characterization of silver microgap sensor on silicon substrate. By employing cheap photolithography process the proposed microgap sensor has been fabricated. The silver microgap ...
Conventional photolithography and process optimization of pattern- size expansion technique for nanogap biosensor fabrication
(Trans Tech Publications, 2014)
For a submicron photolithography process, there is little room for error. In this paper, an optimized technique for photoresist (PR) development is reported, to fabricate a nanogap biosensor for application in biomedical ...