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Fabrication and characterization of 50 nm silicon nano-gap structures
(American Scientific Publishers, 2011-04)
A simple method for the fabrication of nano-gaps less than 50 nm by using conventional photolithography combined with patterned-size reduction techniques is presented. Silicon material is used to fabricate the nano-gap ...
From nanostructure to nano biosensor: Institute of Nano Electronic Engineering (INEE), UniMAP experience
(Universitas Negeri Semarang, 2011-11)
Nanostructure is defined as something that has a physical dimension smaller than 100 nanometers, ranging from clusters and/or to dimensional layers of atoms. There are three most important nanostructures that are extensively ...