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    • Fabrication and characterization of 50 nm silicon nano-gap structures 

      T.S, Dhahi; Uda, Hashim, Prof. Dr.; N.M., Ahmed (American Scientific Publishers, 2011-04)
      A simple method for the fabrication of nano-gaps less than 50 nm by using conventional photolithography combined with patterned-size reduction techniques is presented. Silicon material is used to fabricate the nano-gap ...