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Full metadata record
DC Field | Value | Language |
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dc.contributor.author | Amiza, Rasmi | - |
dc.contributor.author | Mohammad Nuzaihan, Md Nor | - |
dc.contributor.author | Uda, Hashim | - |
dc.date.accessioned | 2009-08-28T01:28:47Z | - |
dc.date.available | 2009-08-28T01:28:47Z | - |
dc.date.issued | 2005-05-18 | - |
dc.identifier.citation | p.85-90 | en_US |
dc.identifier.uri | http://dspace.unimap.edu.my/123456789/7104 | - |
dc.description | Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar. | en_US |
dc.description.abstract | Single-electron transistor (SET) is attractive devices to use for large-scale integration. SET can be made very small, dissipate little power, and can measure quantities of charge much faster than MOSFETs. This makes SET would replace field-effect transistor (FET). In this paper, Electron Beam (EBeam) GDS II Editor Software is utilized to design a mask for SOI SET fabrication. This system show promising result producing structure at nanometer scale node. Four masks step are involved namely source/drain & gate mask, Poly-Si gate electrode mask, contact mask, and metallization mask. SOI SET device design with a gate length and gate width of approximately 0.1μm and 0.02μm respectively is generated for fabrication process. In addition, the processes involve in SOI SET fabrication are also discussed. | en_US |
dc.language.iso | en | en_US |
dc.publisher | Kolej Universiti Kejuruteraan Utara Malaysia | en_US |
dc.relation.ispartofseries | Proceedings of the 1st National Conference on Electronic Design | en_US |
dc.subject | Single-electron transistor (SET) | en_US |
dc.subject | Single-electron transistor (SET) -- Design and construction | en_US |
dc.subject | Transistors | en_US |
dc.subject | Litography | en_US |
dc.subject | Electron Beam Lithography (EBL) | en_US |
dc.subject | Lithography, Electron beam | en_US |
dc.title | SOI Single-Electron Transistors (SET) design and process development | en_US |
dc.type | Working Paper | en_US |
Appears in Collections: | Conference Papers Uda Hashim, Prof. Ts. Dr. |
Files in This Item:
File | Description | Size | Format | |
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SOI Single-Electron Transistors (SET) Design and Process Development.pdf | 177.26 kB | Adobe PDF | View/Open |
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