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Macro and nanoscopic characteristics of SiC-SiO2 interface roughness and leakage current through vacuum annealed thermally nitrided SiO2 gate on 4H-SiC109

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Macro and nanoscopic characteristics of SiC-SiO2 interface roughness and leakage current through vacuum annealed thermally nitrided SiO2 gate on 4H-SiC73151020

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Macro and Nanoscopic Characteristics of SiC-SiO2 Interface Roughness and Leakage Current Through Vacuum Annealed Thermally Nitrided SiO2 Gate on 4H-SiC.pdf8

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