Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "Zinc magnetron sputtering plasma"
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Electron and ion densities measurement in reactive magnetron zinc sputtering plasma
(Trans Tech Publications, 2014)Investigation on the plasma properties is an essential fundamental works in order to precisely control the growth of nanoscale thin film. In the present work, we produced and study the reactive magnetron sputtering plasma ...