Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "Physical characterization"
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Polysilicon nanogap fabrication using a thermal oxidation process
(Emerald Group Publishing Limited., 2012)Purpose - Nanogap electrodes have important applications in power saving devices, electrochemical sensors and dielectric detections of biomolecules. The purpose of this paper is to report on the fabrication and characterization ...