Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "Negative photoresists and pattern transfer"
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Chrome mask design for microfluidic fabrication
(Trans Tech Publications, 2013)This paper presents a simple and effective method to design chrome mask for microfludic fabrication. Microfluidic fabrication involves 9 major step and mainly depends on the master mold template formation by SU-8 photoresists ...