Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "Chrome mask"
Now showing items 1-3 of 3
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Designing microchannels separator mask for lithography process
(Trans Tech Publications, 2013)Recently microfluidic has drawn attention from fellow research because of their unique properties and behavior in biotechnology, biomedical, micro and nanotechnology. Microfluidic is a combination from several components ... -
Low cost detection of pH and its effect on the capacitive behavior of micro-gap sensor
(Trans Tech Publications, 2014)The article describes the fabrication and characterization of silver microgap sensor on silicon substrate. By employing cheap photolithography process the proposed microgap sensor has been fabricated. The silver microgap ... -
Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler
(Scientific.Net, 2012-12)A compact nanolaboratory on single chip is one of the challenging tasks for future reproductively of sensitive and selective lab-on-chip. This paper reports a simple and controllable technique for patterning microgap ...