Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Author "bala.sharmarao@gmail.com"
Now showing items 1-4 of 4
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Conventional photolithography and process optimization of pattern- size expansion technique for nanogap biosensor fabrication
Balakrishnan, Sharma Rao; Muhammad Nurfaiz, Asri; Uda, Hashim, Prof. Dr.; Tijjani Adam, Shuwa (Trans Tech Publications, 2014)For a submicron photolithography process, there is little room for error. In this paper, an optimized technique for photoresist (PR) development is reported, to fabricate a nanogap biosensor for application in biomedical ... -
Microfluidic photomask design using CAD software for application in lab-on-chip biomedical nano diagnostics
Balakrishnan, Sharma Rao; Uda, Hashim, Prof. Dr. (Trans Tech Publications, 2013)Photomasks are used as stencil to print images on semiconductor material. This study represents design and specifications of photomask for microfluidic fabrication. For a precise pattern transfer, the photomask should meet ... -
Nanoelectrode chrome photomask design and specification for biosensor fabrication
Balakrishnan, Sharma Rao; Uda, Hashim, Prof. Dr. (Trans Tech Publications, 2013)This paper explains the most crucial part of any microchip fabrication, which is the mask design for photolithography process. The design is initially sketched roughly to meet the design specification and later on designed ... -
Thin film thickness and uniformity measurement for lab-on-chip based nanoelectrode biosensor development
Balakrishnan, Sharma Rao; Uda Hashim, Prof. Dr.; Tijjani Adam, Shuwa (Trans Tech Publications, 2014)One of the advantages of silicon substrate over other semiconductor substrate is the high temperature process capability of the silicon. In this work, silicon wafer is used for thermal processing which involves many high ...