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dc.contributor.authorQazi Muhammad, Humayun
dc.contributor.authorUda, Hashim, Prof. Dr.
dc.contributor.authorTijjani Adam, Shuwa
dc.date.accessioned2014-04-08T07:22:25Z
dc.date.available2014-04-08T07:22:25Z
dc.date.issued2014
dc.identifier.citationAdvanced Materials Research, vol.832, 2014, pages 73-78en_US
dc.identifier.issn1662-8985
dc.identifier.urihttp://dspace.unimap.edu.my:80/dspace/handle/123456789/33531
dc.descriptionLink to publisher's homepage at http://www.ttp.net/en_US
dc.description.abstractThe article describes the fabrication and characterization of silver microgap sensor on silicon substrate. By employing cheap photolithography process the proposed microgap sensor has been fabricated. The silver microgap sensor was used for pH sensing, by dropping different pH on microgap surface. To obtain the microgap sensor structure by using AutoCAD software, mask was designed. To maintain high accuracy in pattern transfer the AutoCAD design mask was transferred to chrome glass mask. The fabricated silver microgap pH sensor gap spacing was around 03μm. From the electrical data we conclude that when the pH value varies from acidic to basic (pH 1, pH 2 to pH 11, pH 13) the value of capacitance decreased from 33pF to 8pF. The result shows that the silver microgap pH sensor has the ability to differentiate the acidic pH form basic one. The next part of the research is to decrease the microgap spacing until reach to nanosize spacing, so that can easily used for biosensing application.en_US
dc.language.isoenen_US
dc.publisherTrans Tech Publicationsen_US
dc.subjectCapacitanceen_US
dc.subjectChrome masken_US
dc.subjectMicrogapen_US
dc.subjectpHen_US
dc.subjectPhotolithographyen_US
dc.subjectSensoren_US
dc.titleLow cost detection of pH and its effect on the capacitive behavior of micro-gap sensoren_US
dc.typeArticleen_US
dc.identifier.urlhttp://www.scientific.net/AMR.832.73
dc.identifier.doi10.4028/www.scientific.net/AMR.832.73
dc.contributor.urlqazihumayun2@gmail.comen_US
dc.contributor.urluda@unimap.edu.myen_US
dc.contributor.urltijjaniadam@yahoo.comen_US


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