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| Simulation and characterization of MEMS piezoelectric thermal actuator | 100 |
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| May 2024 | June 2024 | July 2024 | August 2024 | September 2024 | October 2024 | November 2024 | |
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| Simulation and characterization of MEMS piezoelectric thermal actuator | 2 | 7 | 4 | 5 | 2 | 6 | 4 |
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