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Simulation for forming Shallow Trench Isolation in the IC using TCAD tools | 70 |
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Simulation for forming Shallow Trench Isolation in the IC using TCAD tools | 4 | 0 | 0 | 1 | 1 | 9 | 3 |
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Abstract, Acknowledgment.pdf | 2 |
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Results and discussion.pdf | 1 |
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