Browsing School of Microelectronic Engineering (Theses) by Author "Normah, Ahmad"
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Characterization of alignment mark to obtain reliable alignment performance in advanced lithography
Normah, Ahmad (Universiti Malaysia Perlis (UniMAP)School of Microelectronic Engineering, 2007)The continued downscaling of semiconductor fabrication has imposed increasingly tighter overlay tolerances. Such tight tolerances will require very high performance in alignment. Hence, the objective of this research to ...