Browsing Theses & Dissertations by Author "Siti Fatimah, Abd Rahman"
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Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization
Siti Fatimah, Abd Rahman (Universiti Malaysia Perlis (UniMAP)School of Microelectronic Engineering, 2011)This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. Prior to actual fabrication process, ...