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Design and analysis of Three-Axis Piezoresistive accelerometer
(Universiti Malaysia Perlis, 2008-04)
Recently, micro-electromechanical system (MEMS) technologies have been used to
manufacturer accelerometers. MEMS sensors include tranducers elements and the necessary signal conditioning electronics integrated together ...
MEMS Cantilever beam monitor
(Universiti Malaysia Perlis, 2008-04)
Three cantilever beam monitor has been designed using the same material and dimension. They are the center, left and right cantilever beam with their own contact pad. The center beam can be displaced to the right or left ...