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Low cost detection of pH and its effect on the capacitive behavior of micro-gap sensor
(Trans Tech Publications, 2014)
The article describes the fabrication and characterization of silver microgap sensor on silicon substrate. By employing cheap photolithography process the proposed microgap sensor has been fabricated. The silver microgap ...
Polysilicon nanogap fabrication using a thermal oxidation process
(Emerald Group Publishing Limited., 2012)
Purpose - Nanogap electrodes have important applications in power saving devices, electrochemical sensors and dielectric detections of biomolecules. The purpose of this paper is to report on the fabrication and characterization ...