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Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices
(Universiti Kebangsaan Malaysia, 2011-11-18)
We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable ...
Fabrication of amorphous silicon microgap structure for energy saving devices
(Sains Malaysiana., 2012-06)
We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable ...