Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "LPCVD"
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Thin film thickness and uniformity measurement for lab-on-chip based nanoelectrode biosensor development
(Trans Tech Publications, 2014)One of the advantages of silicon substrate over other semiconductor substrate is the high temperature process capability of the silicon. In this work, silicon wafer is used for thermal processing which involves many high ...