Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "Thermal oxidation"
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Fabrication of silicon nanowires by electron beam lithography and thermal oxidation size reduction method
(Trans Tech Publications, 2014)A simple method for the fabrication of silicon nanowires using Electron Beam Lithography (EBL) combined with thermal oxidation size reduction method is presented. EBL is used to define the initial silicon nanowires of ... -
Probing the Ph measurement of self-alligned polysilicon nanogap capacitor
(Trans Tech Publications, 2012)With their bright potential in effective sensing, nanogap capacitor show promise as a device to measure wider aspect of dielectric properties. In this paper, we demonstrate the effectiveness of nanogap capacitor in detecting ...