Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Subject "Pattern transfer"

Now showing items 1-2 of 2

    • Mask design and fabrication of Micro/Nanowire biochip for reliable and repeatability pattern transfer 

      Veeradasan, Perumal; Uda, Hashim, Prof. Dr.; Tijjani Adam, Shuwa (Trans Tech Publications, 2014)
      In Micro/Nanowire fabrication, the alignment and exposure process are the most critical steps in photolithography process, and indeed for the whole biochip processing. This process determines the success of transferring ...

    • Mask design platform for zinc oxide nanowire growth 

      Rajintra Prasat, Haarindra Prasat; Uda, Hashim, Prof. Dr.; Tijjani Adam, Shuwa (Trans Tech Publications, 2013)
      This paper mainly represent the simple and effective method to design the chrome mask for patterning the platform for zinc oxide nanowire growth. The most essential aspect that need to be considered in designing the chrome ...