Browsing Institute of Nano Electronic Engineering (INEE) (Articles) by Author "m.nuzaihan@unimap.edu.my"
Now showing items 1-4 of 4
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Design and fabrication of silicon nanowire based sensor
Siti Fatimah, Abd Rahman; Nor Azah, Yusof, Prof. Dr.; Uda, Hashim, Prof. Dr.; Mohammad Nuzaihan, Md Nor (Electrochemical Science Group (ESG), 2013)This paper reports the process development of silicon nanowires sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. By using silicon-on-insulator (SOI) wafer as a ... -
Fabrication of silicon nanowires by electron beam lithography and thermal oxidation size reduction method
Mohammad Nuzaihan, Md Nor; Uda, Hashim, Prof. Dr.; Nazwa, Taib; Tijjani Adam, Shuwa (Trans Tech Publications, 2014)A simple method for the fabrication of silicon nanowires using Electron Beam Lithography (EBL) combined with thermal oxidation size reduction method is presented. EBL is used to define the initial silicon nanowires of ... -
Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique
Mohammad Nuzaihan, Md Nor; Uda, Hashim, Prof. Dr.; Siti Fatimah, Abdul Rahman; Tijjani Adam, Shuwa (Trans Tech Publications, 2014)In this work, we report the used of Negative Pattern Scheme (NPS) by Electron Microscope Based Electron Beam Lithography (EBL) Technique in connection with scanning electron microscope (SEM) for creating extremely fine ... -
Probing the Ph measurement of self-alligned polysilicon nanogap capacitor
Nazwa, Taib; Uda, Hashim, Prof. Dr.; Mohammad Nuzaihan, Md Noor (Trans Tech Publications, 2012)With their bright potential in effective sensing, nanogap capacitor show promise as a device to measure wider aspect of dielectric properties. In this paper, we demonstrate the effectiveness of nanogap capacitor in detecting ...