Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

Abstract

Gait analysis measurement is a method used to access and identify gait events and the measurements of motion parameters involving the lower part of the body. This significant method is widely used in rehabilitation, sports, and health diagnostics for improving the quality of life. However, it is not a routine practice due to costs involved in creating and using gait labs. Alternatively, inertial sensors such as microcantilever accelerometer can be used in the development of cheap and wearable gait analysis systems. Human stride segmentation measurement based on a micro-accelerometer cantilever is used in the study of the lower limb movement patterns that include walking, jumping and running, as well as the measurements of the motion parameters. A complete system consisting of a fabricated sensor, a Wheatstone bridge circuit, and a signal amplifier tailored for real-time stride analysis measurement is proposed. A novel fabrication method for an accelerometer sensor using laser micromachining is introduced in order to develop a simple way for realizing sensor formation. This study allows us to optimize the requirements of hard-mask and fabrication process steps by reductions of 30% and 25% respectively. In the general framework, this research activity is focused towards the development of a piezoresistive cantilever formation using laser micromachining for fast fabrication development of a real life gait and stride segmentation measurement application.