Surface modification of titanium dioxide thin film for ss-DNA detection

Abstract

This paper studies the Capacitance-Frequency of titanium dioxide (TiO₂) thin film-based interdigitated electrodes (IDEs) for ss-DNA immobilization. TiO₂ thin film was deposited on P-type silicon dioxide (SiO₂) (1 0 0) substrates using monoethanolamine (MEA) sol-gel route by spin-coating method. Titanium butoxide was used as a precursor source while ethanol and MEA were used as a disperser and stabilizer respectively. Metal IDEs of aluminium (Al) was deposited on the synthesized films for the electrical characterization. From the electrical data, it proves that the synthesized TiO₂ thin film is effective and can be used for the synthesis of TiO₂ thin films with biomedical application.