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    • Microelectromechanical Systems (MEMS) Heatuator 

      Zaliman, Sauli, Prof. Madya; Hasnizah, Aris; Razaidi, Hussin; Mohd Hafiz, Ismail; Rizalfande, Che Ismail (International Exhibition of Inventions, 2007-04-18)
      Heatuator is a thermal actuator that converts electrical energy to mechanical motions. For an input electrical power of 25 mW (5V, 5mA), this device is capable of over 20uN of force with 10um of deflection. This heatuator ...