Microelectromechanical Systems (MEMS) Heatuator

Abstract

Heatuator is a thermal actuator that converts electrical energy to mechanical motions. For an input electrical power of 25 mW (5V, 5mA), this device is capable of over 20uN of force with 10um of deflection. This heatuator works on the basis of differential thermal expansion between the thin arm and the blade. A potential difference is applied across the electrical connection pads will induced a current to flow through the arm and blade. This current flowing through the device causes differential heating of the thin arm and blade due to different current densities. The greater thermal expansion of the thin (hotter) arm causes the tip of the device to deflect.