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CF₄+Argon (1) |
DOE (2) |
Platinum (2) |
Reactive Ion Etching (RIE) (2) |
SF₆+Argon (1) |
Surface roughness (2) |
CF₄+Argon (1) |
DOE (2) |
Platinum (2) |
Reactive Ion Etching (RIE) (2) |
SF₆+Argon (1) |
Surface roughness (2) |