Browsing School of Microelectronic Engineering (Articles) by Subject "Microfluidics"

Now showing items 1-2 of 2

    • Design and fabrication of Microfluidic devices: MOSFET & Capacitor 

      Osman, R. A.; Esa, S. R.; Prabakaran, Poopalan (Institute of Electrical and Electronics Engineers (IEEE), 2006)
      Microfluidic devices, based on silicon, are fabricated by photolithography, wet chemical etching with focus on an liquid conduction channel n-channel depletion MOSFET and a silica-liquid dielectric capacitor. Masks for ...

    • Silica microchannel fabrication using fluorine based rie with alas a mask 

      Wan Mokhzani, Wan Norhaimi; Retnasamy, Vithyacharan; Zaliman, Sauli, Assoc. Prof. Dr.; Taniselass, Steven; Ahmad Husni, Mohd Shapri; Norazeani, Abdul Rahman; Abdul Halis, Abdul Aziz (INSInet Publications, 2012-09)
      The silica microchannel fabrication process has been executed with Al thin films as the sacrificial layer during Reactive Ion Etching Process (RIE). CF4/Ar and SF6/Ar plasmas has been used to investigate etch rate of Al ...