Browsing School of Microelectronic Engineering (Articles) by Author "wanmokhdzani@unimap.edu.my"
Now showing items 1-2 of 2
-
Microfluidic channel depth determination with Tywman-Green interferometer
Wan Mokhdzani, Wan Nor Haimi; Zaliman, Sauli, Prof. Madya Dr.; Retnasamy, Vithyacharan; Taniselass, S.; N., Ramli; M. H. A. Aziz; R., Hatta (Springer-Verlag London., 2013-07)A microfluidic channel is fabricated on a silica wafer using reactive ion etching (RIE). The depth of the microfluidic channel has been measured using a surface profilometer and a Twyman-Green interferometer (TGI) setup. ... -
Silica microchannel fabrication using fluorine based rie with alas a mask
Wan Mokhzani, Wan Norhaimi; Retnasamy, Vithyacharan; Zaliman, Sauli, Assoc. Prof. Dr.; Taniselass, Steven; Ahmad Husni, Mohd Shapri; Norazeani, Abdul Rahman; Abdul Halis, Abdul Aziz (INSInet Publications, 2012-09)The silica microchannel fabrication process has been executed with Al thin films as the sacrificial layer during Reactive Ion Etching Process (RIE). CF4/Ar and SF6/Ar plasmas has been used to investigate etch rate of Al ...