Browsing School of Microelectronic Engineering (Articles) by Author "Shazlina, Johari, Dr."
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Design and analysis of various microcantilever shapes for MEMS based sensing
Huzein Fahmi, Hawari; Yufridin, Wahab, Dr.; M. T., Azmi; Ali Yeon, Md Shakaff, Prof. Dr.; Uda, Hashim, Prof. Dr.; Shazlina, Johari, Dr. (Institute of Physics Publishing, 2014)One the major requirements for sensing devices is its sensitivity. This paper presents the design, analysis and simulation of various types of MEMS based microcantilevers shapes and their influence on sensing sensitivity. ...