Search
Now showing items 1-2 of 2
Rapid response room temperature oxygen sensor based on Trivalent-Elements doped TiO2 thin film
(Universiti Malaysia Perlis (UniMAP), 2021-07)
Trivalent metal-doped TiO2 thin films have been extensively investigated in gas sensor applications. The trivalent metal dopants are Al, Y and Gd. The trilayer fabrication of a gas sensor consists of a thin film, sputtered ...
Effect of discharge power on the properties of GaN thin films on AlN-(002) prepared by magnetron sputtering deposition
(Universiti Malaysia Perlis (UniMAP), 2020-07)
Aluminum nitride (AlN) and gallium nitride (GaN) thin films were grown on silicon (Si) substrates using the conventional RF magnetron sputtering plasma deposition system. The growth rate of GaN increased as the deposition ...